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THz Optoelectronics Fabrication Facility




The Ultrafast THz Optoelectronics Laboratory (UTOL) uses a 250 square foot, class 1000 cleanroom for fabrication of custom optoelectronic THz devices. The UTOL cleanroom is funded by a Lloyd Noble Foundation award to the College of Engineering, Architecture, and Technology and by a National Science Foundation Major Research Instrumentation grant. The cleanroom facility includes the cleanroom space with attached gowning area, an adjacent teaching studio, and two adjacent rooms for other processing equipment.

Equipment for this cleanroom was made possible by support from the National Science Foundation through a Major Research Instrumentation award, 9977140.

The cleanroom was additionally supported by a Noble Foundation grant to the OSU College of Engineering, Architecture, and Technology.