THz Optoelectronics Fabrication Facility
The cleanroom was funded and designed specifically for use of the Ultrafast THz
Optoelectronic Laboratory. The cleanroom is not designed for, or set up to be,
a job shop or general use facility. As a result, unsupervised use of the cleanroom
is restricted to UTOL personnel.
Researchers at OSU who wish to use this facility must make prior arrangements with
the ECEN faculty listed on the Contacts page. Furthermore all users must agree to abide by the
following cleanroom use policy:
UTOL also welcome contacts by organizations outside of OSU to set up joint research projects involving use of these facilities. Please contact one of the cleanroom supervisors to discuss ideas for joint projects.
- All users must pass a certification course offered by the OSU School of Electrical and Computer Engineering.
- Any use of the cleanroom or associated instruments must be arranged at least three days in advance to minimize scheduling
- Any specialized processing supplies (chemicals, saw blades, etc.) must be supplied by the user, and certified by UTOL personnel. You may be asked to pay a share of general use supplies such as DI water, bonder wire, process chemicals, or gowns.
- Should extensive, long term use of any piece of equipment be required we will ask you to share in any repair or maintenance of this equipment.
- All equipment or cleanroom use must be logged.
- Users must put away all equipment and chemicals and leave the facilities clean regardless of the state of the cleanroom area when they arrived. This includes turning off any utilities such as water or gas.
- Proper cleanroom procedures including gowning will be followed at all times.
- Any damage or maintenance issues must be reported to the cleanroom supervisors immediately.
- We reserve the right to refuse use of these facilities to any person at any time with no prior notice.